Most existing slot filling models tend to memorize inherent patterns of entities and corresponding contexts from training data. However, these models can lead to system failure or undesirable outputs when being exposed to spoken language perturbation or variation in practice. We propose a perturbed semantic structure awareness transferring method for training perturbation-robust slot filling models. Specifically, we introduce two MLM-based training strategies to respectively learn contextual semantic structure and word distribution from unsupervised language perturbation corpus. Then, we transfer semantic knowledge learned from upstream training procedure into the original samples and filter generated data by consistency processing. These procedures aim to enhance the robustness of slot filling models. Experimental results show that our method consistently outperforms the previous basic methods and gains strong generalization while preventing the model from memorizing inherent patterns of entities and contexts.